The EPX Series supports clean and light
duty semiconductor processing applications such as ash/strip and implant end
The EPX Series offers on-tool pumping in a very light small package and delivering exceptionally clean vacuum.. Using a unique, patented, single-shaft regenerative Holweck® stage mechanism, EPX pumps are capable of evacuating from atmosphere to ultimate pressures of Torr.
Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated MicroTIM electronics also provide simple communication connections to the process tool.
Target applications include:
Discover what makes us different...Corporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
Learn More about Our History
Learn more about the EPX product line...
EPX Dry Pumps Product Brochure
Edwards has obsoleted all FabWorks and pre-FabWorks Equipment Monitoring products on January 15, 2017
Learn more about FabWorks Obsolescence